A high precision micropositioner with five degrees of freedom based on an electromagnetic driving principle

Review of Scientific Instruments

Volumn 67, Issue 1, 1996, Pages 312-317

  Wang, Wanjun ^a   He, Tian ^a  

^a Louisiana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003281930     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146587     Document Type: Article

References (28)

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