Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1609-1612

  Engelmark, F ^a   Fucntes, G ^a   Katardjiev, I V ^a   Harsta, A ^a   Smith, U ^a   Berg, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY MEASUREMENT; ALUMINUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; FILM GROWTH; NUCLEATION; PIEZOELECTRIC MATERIALS; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

ALUMINUM NITRIDE; PIEZOELECTRIC COUPLING;

DIELECTRIC FILMS;

EID: 0034224115     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582394     Document Type: Article

References (10)

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