Silicon resonator sensor systems using self-mixing interferometry

Sensors and Actuators, A: Physical

Volumn 55, Issue 2-3, 1996, Pages 71-77

  Hauptmann, M A ^a   Grattan, K T V ^a   Palmer, A W ^a   Fritsch, H ^b   Lucklum, R ^b   Hauptmann, P R ^b  

^a CITY UNIVERSITY   (United Kingdom)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Optical fibre interferometry; Silicon resonator systems

Indexed keywords

INTERFEROMETERS; INTERFEROMETRY; LIGHT REFLECTION; OPTICAL FIBERS; OPTICAL RESONATORS; SEMICONDUCTING SILICON; SEMICONDUCTOR LASERS;

SELF MIXING INTERFEROMETRY; SILICON RESONATOR SENSOR SYSTEMS;

SILICON SENSORS;

EID: 0030181538     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80059-3     Document Type: Article

References (16)

1. G. Stemme, Resonant silicon sensors J. Micromech. Microeng. 1 (1991) 117-118.
2. P. Hauptmann, Sensors: Principles and Applications, Prentice Hall, Hertfordshire, UK, 1993, p. 79.
3. K. Peterson, Silicon micromachined sensors, in K.T.V. Grattan and A.T. Augousti (eds.), Sensors VI: Technology Systems and Applications, Institute of Physics, Bristol, 1993, pp. 109-118.
4. R.W. Bogue, Silicon sensors in Western Europe, in K.T.V. Grattan and A.T. Augousti, (eds.), Sensors VI: Technology Systems and Applications, Institute of Physics, Bristol, 1993, pp. 119-127.
5. R.F. Wolffenbuttel, Silicon Sensors and Circuits: On Chip Compatibility, Chapman and Hall, London, 1996.
6. W.M. Wang, Fibre-optic Doppler velocimeter that incorporates active optical feedback from a diode laser, Optics Lett., 17 (1992) 819-821.
7. S.F. Collins, W.X. Huang, M.H. Murphy, K.T.V. Grattan and A.W. Palmer, Range measurement over a 20 meter path using an intensity-chirped laser diode, Meas. Sci. Technol., 5 (1994) 753-755.
8. B.T. Meggitt, Fiber optic white-light interferometric sensors, in K.T.V. Grattan and B.T. Meggitt (eds.), Optical Fiber Sensor Technology, Chapman and Hall, London, 1995, pp. 269-312.
9. S. Shinohara, A. Mochijuki, H. Yoshida and M. Sumi, Laser Doppler velocimeter using the self-mixing effect of a semiconductor laser diode Appl. Opt. 25, (1986) 1417-1419.
10. W.M. Wang, W.J.O. Boyle, K.T.V. Grattan and A.W. Palmer, Self-mixing interference in a diode laser: experimental observations and theoretical analysis, Appl. Opt., 32 (1993) 1551-1558.
11. W.M. Wang, K.T.V. Grattan, A.W. Palmer and W.J.O. Boyle, Self-mixing interference inside a single-mode diode laser for optical sensing applications, IEEE J. Lightwave Technol., LT-12 (1994) 1577-1587.
12. A.J. Jacobs-Cook and M.E.Z. Bowen, Planar fibre optic interface for silicon microresonators, in K.T.V. Grattan and A.T. Augousti (eds.), Sensors VI: Technology Systems and Applications, Institute of Physics, Bristol, 1993, pp. 147-154.
13. H. Bezzaoni and E. Voges, Integrated optics combined with micromechanics on silicon, Sensors and Actuators A, 29 (1991) 219-223.
14. D. Lenstra, B.H. Verbeek and A.J. den Boef, Coherence collapse in single-mode semiconductor lasers due to optical feedback, IEEE J. Quantum Electron, QE-21 (1985) 674-679.
15. K.T.V. Grattan, A.W. Palmer, N. Samaan and F. Abdullah, Mathematical analysis of optically powered quartz resonant structures in sensor applications, IEEE, J. Lightwave Technol., LT-7 (1984) 202-208.
16. J.R. Acton and P.T. Squire, Solving Equations with Physical Understanding, Adam Hilger, Bristol, 1985, pp. 97-109.