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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2222-2231

Interfacial chemistry of the Sr/SioxNy/Si(100) nanostructure

(2) Kirsch, P D a Ekerdt, J G a

a The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL BONDS; DIELECTRIC MATERIALS; DIFFUSION; INTERFACES (MATERIALS); REACTION KINETICS; SECONDARY ION MASS SPECTROMETRY; SILICON COMPOUNDS; STRONTIUM; SURFACE CHEMISTRY; X RAY PHOTOELECTRON SPECTROSCOPY;

DIELECTRIC BARRIERS;

NANOSTRUCTURED MATERIALS;

EID: 0035440996 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1379803 Document Type: Article

Times cited : (24)

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