Growth chemistry of ultrathin silicon nitride and oxynitride passivation layers on Si(100)

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 335-340

  Kamath, A ^a   Kim, B Y ^a   Blass, P M ^a   Sun, Y M ^a   White, J M ^a   Kwong, D L ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DIFFUSION IN SOLIDS; MOLECULAR STRUCTURE; NITROGEN OXIDES; PASSIVATION; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SEMICONDUCTOR JUNCTIONS; SILICA; SILICON NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

OXYNITRIDE; THERMAL GROWTH;

SEMICONDUCTING FILMS;

EID: 0030655245     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)