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Microelectronics Reliability

Volumn 41, Issue 8, 2001, Pages 1161-1169

Spectroscopic photon emission microscopy: A unique tool for failure analysis of microelectronics devices

(2) De Wolf, Ingrid a,b Rasras, Mahmoud a

a IMEC (Belgium)

b LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; INTERPOLATION; ION BEAMS; LIGHT EMISSION; MICROPROCESSOR CHIPS; SPECTRUM ANALYSIS;

SPECTROSCOPIC PHOTON EMISSION MICROSCOPY;

MICROELECTRONICS;

EID: 0035418249 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(01)00104-4 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.