A reliability study of titanium silicide lines using micro-Raman spectroscopy and emission microscopy

Microelectronics Reliability

Volumn 37, Issue 10-11, 1997, Pages 1591-1594

  De Wolf, I ^a   Howard, D J ^a   Rasras, M ^a   Lauwers, A ^a   Maex, K ^a   Groeseneken, G ^a   Maes, H E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; ELECTRIC RESISTANCE MEASUREMENT; INTEGRATED CIRCUITS; MICROSCOPIC EXAMINATION; PHASE TRANSITIONS; RAMAN SPECTROSCOPY; RELIABILITY;

EMISSION MICROSCOPY; MICRO RAMAN SPECTROSCOPY; TITANIUM SILICIDE;

TITANIUM COMPOUNDS;

EID: 0031251558     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(97)00117-0     Document Type: Article

References (5)

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3. I. De Wolf, D. J. Howard, A. Lauwers, K. Maex, H. E. Maes, Appl. Phys. Lett. 70(17), p. 2262 (1997)
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