Temperature Profile Measurement and Failure Characterization of ESD Protection Devices Using Spectroscopic Photon Emission Microscopy and Raman Spectroscopy

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1999, Pages 69-76

  Rasras, Mahmoud ^a   De Wolf, Ingrid ^a   Groeseneken, Guido ^a   Chen, Jian ^a   Bock, Karlheinz ^a   Maes, Herman E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC EQUIPMENT PROTECTION; ELECTROSTATICS; FAILURE (MECHANICAL); LEAKAGE CURRENTS; LIGHT EMISSION; PHOTONS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; TEMPERATURE MEASUREMENT;

PHOTON EMISSION SPECTROSCOPY (PEM); RAMAN SHIFT;

MOSFET DEVICES;

EID: 1542360758     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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