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Semiconductor Science and Technology

Volumn 16, Issue 7, 2001, Pages 584-588

Depth profiling of strain using micro-Raman measurements

(5) Atkinson, A a Jain, S C b Maes, H E b Pinardi, K c Willander, M c

a IMPERIAL COLLEGE LONDON (United Kingdom)

b IMEC (Belgium)

c CHALMERS UNIVERSITY OF TECHNOLOGY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSING; HETEROJUNCTIONS; INTERFACES (MATERIALS); LAPLACE TRANSFORMS; RAMAN SPECTROSCOPY; STRAIN;

DEPTH PROFILING; GRADED INTERFACES;

PROFILOMETRY;

EID: 0035397859 PISSN: 02681242 EISSN: None Source Type: Journal
DOI: 10.1088/0268-1242/16/7/310 Document Type: Article

Times cited : (9)

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