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Volumn 48, Issue 4, 2001, Pages 1103-1110
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Deflection characteristics of a trapezoidal multilayer in-plane bending piezoelectric actuator
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Author keywords
[No Author keywords available]
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Indexed keywords
NUMERICAL ANALYSIS;
OPTICAL MULTILAYERS;
PIEZOELECTRIC DEVICES;
SCREEN PRINTING;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE MODELS;
SERVOMECHANISMS;
THICK FILMS;
HIGH DENSITY HARD DISK DRIVES;
SPLIT MORPH ACTUATOR;
VOLTAGE SENSITIVITY;
ACTUATORS;
ARTICLE;
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EID: 0035384790
PISSN: 08853010
EISSN: None
Source Type: Journal
DOI: 10.1109/58.935729 Document Type: Article |
Times cited : (6)
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References (15)
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