Characteristics of silicon-micromachined gas sensors based on Pt/TiOx thin films

Sensors and Actuators, B: Chemical

Volumn 42, Issue 3 B, 1997, Pages 205-215

  Patel, Sanjay V ^a,c   Wise, Kensall D ^a,d,e,f   Gland, John L ^a,c   Zanini Fisher, Margherita ^b   Schwank, Johannes W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b FORD MOTOR COMPANY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d PURDUE UNIVERSITY   (United States)

^e STANFORD UNIVERSITY   (United States)

^f Telephone Laboratories   (United States)

Author keywords

Gas sensor; Hydrogen sensor; Platinum; Propylene sensor; Thin films; Titania

Indexed keywords

CATALYSIS; HYDROGEN; OXIDATION; PLATINUM COMPOUNDS; PROPYLENE; TITANIUM DIOXIDE;

GAS SENSOR; HYDROGEN SENSOR; PROPYLENE SENSOR;

CHEMICAL SENSORS;

EID: 0031200070     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80337-1     Document Type: Article

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