Combined resistive and calorimetric sensing of gases using a single silicon micromachined device

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 935-938

  Shin, Hyun Woo ^a   Lloyd, Craig ^a   Gardner, Julian W ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETERS; FABRICATION; MICROMACHINING; SILICON WAFERS; SUBSTRATES; THIN FILMS;

CALORIMETRIC SENSING; CHEMORESISTOR; MICROCALORIMETER; SILICON MICROMACHINED DEVICE;

CHEMICAL SENSORS;

EID: 0030718960     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)