Sensor, sensor interfacing and front-end data management for stand-alone microsystems

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages

  Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; DATA PROCESSING; INTEGRATED CIRCUIT MANUFACTURE; MICROPROCESSOR CHIPS; MICROSENSORS; SIGNAL PROCESSING;

CMOS PROCESS; FREE RANGING ANIMALS; FRONT END DATA MANAGEMENT; SENSOR DESIGN; SENSOR INTERFACING; STAND ALONE MICROSYSTEMS; SURFACE MOUNT DEVICES;

MICROELECTRONICS;

EID: 0033138344     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/201     Document Type: Article

References (24)

1. Borky J and Wise K 1979 Integrated signal conditioning for silicon pressure sensors IEEE Trans. Electron. Devices 26 1906-10
2. Puers B and Sansen W 1985 A dedicated processing and control IC for pressure telemetry IEEE Custom Integrated Circuits Conf. (Portland, OR, 1985) pp 144-6
3. Sander C, Knutti J and Meindl J 1980 A monolithic capacitive pressure sensor with pulse period output IEEE Trans. Electron. Devices 17 927-30
4. Ko W, Bao M and Hong Y 1982 A high sensitivity integrated circuit capacitive pressure transducer IEEE Trans. Electron. Devices 29 48-56
5. Puers B, Peeters E, Vanden Bossche A and Sansen W 1990 A capacitive pressure sensor with low impedance output and active suppression of parasitic effects Sensors Actuators A 21 108-14
6. Puers B and Sansen W 1988 Silicon and thick film sensors for measuring chemical and mechanical quantities Invited Tutorial. Progress in Biological Function Analysis by Computer Technologies (Amsterdam: Elsevier) pp 33-41
7. Bryzek J 1983 Approaching performance limits in silicon piezoresistive pressure sensors Sensors Actuators 4 669-78
8. Chau H and Wise K 1985 Scaling limits in batch fabricated silicon pressure sensors IEEE Proc. Transducers '85 (Philadelphia, PA, 1985) pp 174-7
9. Puers R and Lapadatu D 1996 Electrostatic forces and their effects on capacitive mechanical sensors Sensors Actuators A 56 203-10
10. Puers B, Sansen W and Vereecken R 1984 Development considerations of a micropower control chip and ultraminiature hybrid for bladder pressure telemetry Biotelemetry VIII ed H Kimmich and H Klewe, pp 328-32
11. Puers R 1993 Capacitive sensors: how and when to use them Sensors Actuators A 37/38 93-105 (invited paper)
12. Van Schuylenbergh K, Peeters E, Puers B, Sansen W and Neetens A 1991 An implantable telemetric tonometer for direct intraocular pressure measurements Abstracts 1st Eur. Conf. on Biomed. Eng. (Nice, France, 1991) pp 194-5
13. Petersen K, Shartel A and Raley N 1982 Micromechanical accelerometer integrated with MOS detection circuitry IEEE Trans. Electron. Devices 29 23-7
14. Rudolf F 1983 A micromechanical capacitive accelerometer with a two-point inertial mass suspension Sensors Actuators 4 191-8
15. Rudolf F, Jornod A and Bencze P 1987 Silicon microaccelerometer Proc. Transducers '87 (Tokyo, Japan, 1987) pp 395-8
16. Rudolf F, Jornod A, Bergqvist J and Leuthold H 1990 Precision accelerometers with μg resolution Sensors Actuators A 21-23 297-302
17. Ura N and Esashi M 1991 Differential capacitive accelerometer Technical Digest 10th Sensor Symp. pp 41-4
18. Puers B and Vergote S 1992 A subminiature capacitive movement detector using a composite membrane suspension Sensors Actuators A 31 90-6
19. Sander C, Knutti J and Meindl J 1980 A monolithic capacitive pressure sensor with pulse period output IEEE Trans. Electron. Devices 17 927-30
20. Hanneborg A et al 1985 A new integrated capacitive pressure sensor with frequency modulated output IEEE Proc. Transducers '85 (Philadelphia, PA, 1985) pp 186-8
21. Wise K and Najafi K 1991 The coming opportunities in microsensor systems Digest IEEE Int. Conf. on Solid-State Sensors and Actuators (San Fransisco, CA, June 1991) pp 2-7
22. Wouters P, De Cooman M, Lapadatu D and Puers R 1994 A low power multi-sensor interface for injectable microprocessor-based animal monitoring system Sensors Actuators A 41/42 198-206
23. Puers B and Lapadatu D 1994 Extremely miniaturised capacitive movement sensors using new suspension systems Sensors Actuators A 41/42 129-35
24. Wouters P, De Cooman M and Puers B 1993 Injectable biotelemetry transponder for identitication and temperature measurement Biotelemetry XII (Ancona, Italy, 1993) ed P Mancini and S Fioretti, pp 383-91