Monolithic optical displacement measurement microsystem

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 400-405

  Zappe, Hans P ^a   Hofstetter, Daniel ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LASERS; MICROELECTROMECHANICAL DEVICES; OPTICAL MATERIALS; OPTICAL VARIABLES MEASUREMENT; OPTICAL WAVEGUIDES; PHOTODETECTORS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON;

MICHELSON INTERFEROMETER; MONOLITHIC OPTICAL DISPLACEMENT MEASUREMENT MICROSYSTEM; OPTICAL CHIPS; OPTOMECHANICAL MICROSYSTEMS;

OPTICAL SYSTEMS;

EID: 0029779169     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)