Micromachined accelerometer with a movable gate transistor sensing element

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 314-324

  Edmans, Daniel M ^a   Gutiérrez, Adolfo ^a   Cormeau, Christophe ^a   Maby, Edward ^b   Kaufman, Howard ^b  

^a InterScience Inc   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Accelerometer; MEMS; Microelectromechanical systems; Micromachining; Movable gate transistor

Indexed keywords

ANALYTICAL MODELS; CANTILEVER BEAM STRUCTURES; CONTROL ELECTRODES; DEVICE MODELING; DYNAMIC RANGES; FIELD EFFECTS; FILM LAYERS; GATE OXIDES; INTERFACE CHARGES; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED ACCELEROMETERS; MICROMACHINED STRUCTURES; MODE OPERATIONS; MOVABLE GATE TRANSISTOR; OXIDE CHARGES; SENSING ELEMENTS;

ACCELEROMETERS; COMPOSITE MICROMECHANICS; DYNAMIC RESPONSE; ELECTROMECHANICAL DEVICES; FEEDBACK; FEEDBACK CONTROL; FIELD EFFECT TRANSISTORS; MACHINING; MECHATRONICS; MEMS; MESFET DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROMECHANICS; OPTICAL DEVICES; POLYSILICON; TRANSISTORS;

FREQUENCY RESPONSE;

EID: 0005152305     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284530     Document Type: Conference Paper

References (6)

1. A. Yoshikawa and T. Suzuki, Properties of a Movable-Gate Field-Effect Structure as an Electromechanical Sensor, J. Acoust. Soc. Am. 46, 725 (1974).
2. H. C. Nathanson, W. E. Newell, R. A. Wickstrom and J. R. Davis, Jr., The Resonant Gate Transistor, IEEE Trans. Electron Devices ED-14, 117 (1967).
3. Meirovitch, L., Analytical Methods in Vibrations, Macmillan Co., NY, 1967
4. Joshi, S. and A. Kelkar, "Control of Large Flexible Space Structures", Chapter 2 in Lecture Notes in Control and Information Systems, vol. 131, Springer Verlag 1989
5. Bar-Kana, H. Kaufman, M. Balas, "Modern Reference Adaptive Control of Large Structural Systems", J, of Guidance, Control, and Dynamics, Mar-Apr, 1983, pp 112-118
6. Bar-Kana, H. Kaufman, "Some Applications of Direct Adaptive Control to Large Structural Systems", J. of Guidance, Control, and Dynamics, Nov-Dec, 1984, pp 717-724