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Plasma Sources Science and Technology

Volumn 10, Issue 2, 2001, Pages 250-259

Experimental investigation of the chemistry in a capacitively coupled hydrocarbon/oxygen radio frequency discharge

(3) Busch, C a,b Moller I a Soltwisch, H a

a RUHR UNIVERSITY BOCHUM (Germany)

b PHILIPS RESEARCH LABORATORIES (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CARBON DIOXIDE; CARBON MONOXIDE; DENSITY MEASUREMENT (SPECIFIC GRAVITY); DISSOCIATION; FLOW OF FLUIDS; GASES; LASER APPLICATIONS; METHANE; OXYGEN; TEMPERATURE MEASUREMENT;

CAPACITIVELY COUPLED RADIO FREQUENCY DISCHARGE; FEED GASES; METHYL RADICAL; PLASMA CHEMISTRY; VOLUME CHEMISTRY; VOLUME REACTION;

PLASMAS;

EID: 0035330910 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/10/2/314 Document Type: Article

Times cited : (21)

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