Some aspects of the chemical kinetics of a reactive molecular plasma

Contributions to Plasma Physics

Volumn 40, Issue 1-2, 2000, Pages 81-85

  Busch, C ^a   Moller I ^a   Soltwisch, H ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CARBON MONOXIDE; ELECTRIC DISCHARGES; MOLECULAR OXYGEN;

FEED GAS; LASER ABSORPTION SPECTROSCOPY; METHYL RADICAL; MOLECULAR PLASMAS; PLASMA CHEMISTRIES; TEMPORAL EVOLUTION;

METHANE;

EID: 0002625164     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1521-3986(200004)40:1/2<81::aid-ctpp81>3.0.co;2-7     Document Type: Article

References (5)

1. RÖPCKE J., MECHOLD J., KÄNIG M., FAN W.Y. AND DAVIES P.B., Plasma Chem. Plasma Process. 19 (1999) 395
2. IKEDA M., ITO H., HIRAMATSU M., HORI M. AND GOTO T., J. Appl. Phys. 82 (1997) 4055
3. BUSCH, C., MÖLLER, I. AND SOLTWISCH, H., submitted to Phys. Plasmas
4. BUSCH, C., Ph.D. thesis, Ruhr-Universität Bochum (1999)
5. OVERZET, L.J. AND HOPKINS, M.B., J. Appl. Phys. 74 (1993) 4323