Membrane-supported CPW with mounted active devices

IEEE Microwave and Wireless Components Letters

Volumn 11, Issue 4, 2001, Pages 167-169

  Liu, Wai Y ^a,b   Steenson, D Paul ^a,b   Steer, Michael B ^a,b  

^a IEEE   (United Kingdom)

^b UNIVERSITY OF LEEDS   (United Kingdom)

Author keywords

CPW; Micromachining; Photosensitive resin; SU 8; Suspended CPW; Transmission lines

Indexed keywords

LOW-TEMPERATURE THERMAL PROCESS; MEMBRANE-SUPPORTED COPLANAR WAVEGUIDES; PHOTOSENSITIVE ORGANIC RESIN;

ANNEALING; DIELECTRIC LOSSES; ELECTRIC LINES; LOW TEMPERATURE OPERATIONS; METALLIZING; MICROMACHINING; MILLIMETER WAVES; PHOTOLITHOGRAPHY; PRINTED CIRCUIT MANUFACTURE; RESINS;

WAVEGUIDES;

EID: 0035322313     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/7260.916332     Document Type: Letter

References (9)

1. Micromachining for terahertz applications
2. Wideband subharmonically pumped W-band mixer in single-ridge fin-line
3. Silicon-based micromachined packages for high-frequency applications
4. x-membranes on GaAs
5. Three-dimensional, W-band circuits using Si micromachining
6. Characteristic impedance of microshield lines with arbitrary shield cross section
7. Microwave straight edge resonator (SER) on silicon membrane
8. Fabrication and characterization of micromachined rectangular waveguide components for use at millileter-wave terahertz frequencies
9. Membrane-supported copper e-plane circuits