Microwave straight edge resonator (SER) on silicon membrane

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1999, Pages 283-286

  Sajin, George ^a   Matei, Elena ^a   Dragoman, Mircea ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

MEMBRANES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; RESONATORS; SEMICONDUCTOR DEVICE MODELS;

STRAIGHT EDGE RESONATORS (SER);

SEMICONDUCTING SILICON;

EID: 0033341239     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)