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IEEE Transactions on Components and Packaging Technologies

Volumn 24, Issue 1, 2001, Pages 67-75

Polymer thick-films on silicon: A route to hybrid microsystems

(2) Papakostas, Thomas V a White, Neil M a

a UNIVERSITY OF SOUTHAMPTON (United Kingdom)

Author keywords

Hybrid; Microsystem; Polymer; Silicon; Thick film

Indexed keywords

ADHESION; ALUMINA; CHEMICAL CLEANING; ENERGY DISPERSIVE SPECTROSCOPY; ETCHING; PASSIVATION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SUBSTRATES; THERMAL EXPANSION; THICK FILM DEVICES;

HYBRID MICROSYSTEMS;

TRANSDUCERS;

EID: 0035279230 PISSN: 15213331 EISSN: None Source Type: Journal
DOI: 10.1109/6144.910804 Document Type: Article

Times cited : (2)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.