Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy election diffration

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1218-1223

  Xie, Xian Ning ^a   Lim, Roderick ^a   Li, Jun ^a   Lin, Sam F Y ^a   Loh, Kian Ping ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

6H Sic; Hydrogen etching; REconstructions; Reflection high energy electron diffraction; RF plasma

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CELLS; ETCHING; GRAPHITE; HYDROGEN; MULTILAYERS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SILICATES;

EPITAXIAL LAYER;

CARBON;

SILICON CARBIDE;

EID: 0035269453     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00398-8     Document Type: Article

References (9)

1. Kong H.S., Glass J.T., Davis R.F. J. Appl. Phys. 64:1988;2672.
2. Johansson L.S.O., Duda L., Laurenzis M., Kriettewirth M., Riehl B. Surf. Sci. 445:2000;109.
3. Bernhardt J., Schardt J., Starke U., Heinz K. Appl. Phys. Lett. 74:1999;1084.
4. Hornetz B., Michel H.-J., Halbritter J. J. Mater. Res. 9:1994;3088.
5. Semond F., Douillard L., Soukiassian P., Dunham D., Amy F., Rivillon S. Appl. Phys. Lett. 68:1996;2144.
6. Afanasev V.V., Bassler M., Pensl G., Schulz M.J., Stein von Kamiensti E. J. Appl. Phys. 79:1996;3108.
7. Kaplan R. Surf. Sci. 215:1989;111.
8. van Bommel A.J., Crombeen J.E., van Tooren A. Surf. Sci. 48:1975;463.
9. Owman F., Martensson P. Surf. Sci. 369:1996;126.