Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV

Thin Solid Films

Volumn 364, Issue 1, 2000, Pages 16-21

  Zapien, J A ^a   Collins, R W ^a   Messier, R ^a  

^a The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; DIFFRACTION GRATINGS; LIGHT POLARIZATION; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL FILTERS; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; ULTRAVIOLET RADIATION;

REAL TIME SPECTROSCOPIC ELLIPSOMETRY (SE);

ELLIPSOMETRY;

EID: 0033879324     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00916-5     Document Type: Article

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