Improvement of the adhesion of sputtered cubic boron nitride films

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 33-38

  Schutze A ^a   Bewilogua, K ^a   Luthje H ^a   Kouptsidis, S ^a   Gaertner, M ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Cubic boron nitride (cBN); Reactive sputtering; conductive target; Steel substrate

Indexed keywords

ADHESION; BORON COMPOUNDS; DIFFUSION IN SOLIDS; FILM GROWTH; FILM PREPARATION; HYDROGEN; NITROGEN; POLISHING; SILICON; SPUTTER DEPOSITION; STEEL; SUBSTRATES;

CONDUCTIVE TARGET; REACTIVE SPUTTERING;

CUBIC BORON NITRIDE;

EID: 0031364820     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00373-3     Document Type: Article

References (18)

1. M. Mieno, T. Yoshida, Jpn. J. Appl. Phys. 29 (1990) L1175.
2. S. Ulrich, J. Scherer, J. Schwan, I. Barzen, K. Jung, M. Scheib, H. Erhardt, Appl. Phys. Lett. 68 (7) (1996) 909.
3. K. Bewilogua, J. Buth, H. Hübsch, M. Grischke, Diamond Relat. Mater. 2 (1993) 1206.
4. A. Schütze, K. Bewilogua, H. Lüthje, S. Kouptsidis, S. Jäger, Surf. Coat. Technol. 74-75 (1995) 717.
5. N. Tanabe, M. Iwaki, Diamond Relat. Mater. 2 (1993) 512.
6. D.J. Kester, R. Messier, J. Appl. Phys. 72 (1992) 504.
7. D. Bouchier, W. Möller, Surf. Coat. Technol. 51 (1992) 190.
8. S.Y. Shapoval, V.T. Petrashov, O.A. Popov, A.O. Westner, M.D. Yoder Jr.,, C.K.C. Lok, Appl. Phys. Lett. 57 (18) (1990) 1885.
9. M. Okamoato, Y. Utsumi, Y. Osaka, Jpn. J. Appl. Phys. 31 (1992) 3455.
10. A. Weber, U. Bringmann, R. Nikulski, C.-P. Klages, Diamond Relat. Mater. 2 (1993) 201.
11. M. Murakawa, S. Watanabe, Surf. Coat. Technol. 43-44 (1990) 145.
12. P.B. Mirkarimi, K.F. McCarty, G.F. Cardinale, D.L. Medlin, D.K. Ottesen, H.A. Johnsen, J. Vac. Sci. Technol. A 14 (1) (1995) 251.
13. G.F. Cardinale, P.B. Mirkarimi, K.F. McCarty, E.J. Klaus, D.L. Medlin, W.M. Clift, D.G. Howitt, Thin Solid Films 253 (1994) 130.
14. P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, W.G. Wolfer, T.A. Friedman, G.F. Cardinale, D.G. Howitt, J. Mater. Res. 9 (11) (1994) 2925.
15. D.J. Kester, K.S. Ailey, D.J. Lichtenwalner, R.F. Davis, J. Vac. Sci. Technol. A 12 (6) (1994) 3074.
16. A. Schütze, K. Bewilogua, H. Lüthje, S. Kouptsidis, Diamond Relat. Mater. 5 (1996) 1130.
17. J. Robertson, Diamond Relat. Mater. 5 (1996) 519.
18. S. Kidner, C.A. Tayler II, R. Clarke, Appl. Phys. Lett. 64 (14) (1994) 1859.