Development of 111 texture in Al films grown on SiO2/Si(001) by ultrahigh-vacuum primary-ion deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 346-351

  Kim, Y W ^a   Petrov, I ^a   Greene, J E ^a   Rossnagel, S M ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; GRAIN SIZE AND SHAPE; IRRADIATION; METALLIC FILMS; RADIATION EFFECTS; SEMICONDUCTING SILICON; SILICA; TEXTURES; VACUUM APPLICATIONS;

LOW ENERGY SELF ION IRRADIATION; PREFERRED ORIENTATION; PRIMARY ION DEPOSITION;

FILM GROWTH;

EID: 0030109550     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579899     Document Type: Article

References (17)

1. D. B. Knorr, D. P. Tracy, and K. P. Rodbell, Appl. Phys. Lett. 59, 3241 (1991).
2. D. B. Knorr and T.-M. Lu, Appl. Phys. Lett. 54, 2210 (1989).
3. S. Vaidya and A. K. Sinha, Thin Solid Films 75, 253 (1981).
4. E. Grantscharova, Thin Solid Films 224, 28 (1993).
5. I. Petrov F. Adibi, and J. E. Greene, Appl. Phys. Lett. 63, 36 (1993).
6. F. Adibi, I. Petrov, J. E. Greene, L. Hultman, and J.-E. Sundgren, J. Appl. Phys. 73, 8580 (1993).
7. L. Hultman, J.-E. Sundgren, J. E. Greene, D. B. Bergstrom, and I. Petrov, J. Appl. Phys. 78, 5395 (1995).
8. D. Dobrev, Thin Solid Films 92, 41 (1982).
9. A. S. Yapsir, L. You, T.-M. Lu, and M. Madden, J. Mater. Res. 4, 343 (1989).
10. Y.-W. Kim, J. Mosser, I. Petrov, J. E. Greene, and S. M. Rossnagel, J. Vac. Sci. Technol. A 12, 3169 (1994).
11. Y. W. Kim, I. Petrov, H. Ito, and J. E. Greene, J. Vac. Sci. Technol. A 13, 2836 (1995).
12. J. Benedict, R. Anderson, and S. J. Klepeis, MRS Symp. Proc. 254, 121 (1992).
13. Powder Diffraction File (JCPDS International Center for Powder Diffraction Data, JCPDS, Swarthmore, PA, 1989), A1 pp. 4-787.
14. IMAGE software, v.1.55, from the National Institute of Health, obtainable from public program site with access address "zippy.nimh.nih.gov" under the directory/pub/nih-image.
15. K.-H. Muller, Phy. Rev. B 35, 7906 (1987).
16. K.-H. Muller, Surf. Sci. Lett. 184, L375 (1987).
17. J. E. Greene, in Handbook of Deposition Technologies for Films and Coatings, 2nd ed., edited by R. F. Bunshah (Noyes, Park Ridge, NJ, 1994), p. 688.