|
Volumn 441, Issue , 1997, Pages 311-322
|
Microstructure control for thin film metallization
a a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
COMPUTER SIMULATION;
CRYSTAL MICROSTRUCTURE;
CRYSTAL ORIENTATION;
FILM GROWTH;
ION BEAMS;
METALLIC FILMS;
MOLECULAR DYNAMICS;
SPUTTER DEPOSITION;
SURFACE ROUGHNESS;
TEXTURES;
VAPOR DEPOSITION;
HILLOCK FORMATION;
PHYSICAL VAPOR DEPOSITION (PVD);
THIN FILMS;
|
EID: 0030721102
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (9)
|
References (24)
|