The scanning low-energy electron microscope: First attainment of diffraction contrast in the scanning electron microscope

Scanning

Volumn 21, Issue 1, 1999, Pages 1-13

  Frank, Ludek ^a   Mullerova I ^a   Faulian, K ^b   Bauer, E ^c  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

^b CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

^c ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Cathode lens; Diffraction; Low energy; Scanning low energy electron microscope; Wave optical contrasts

Indexed keywords

ARTICLE; CRYSTAL STRUCTURE; DIFFRACTION; ELECTROMAGNETIC FIELD; ENERGY TRANSFER; IMAGE ANALYSIS; OPTICS; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0344889201     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950210101     Document Type: Article

References (22)

1. Autrata R: Backscattered electron imaging using single crystal scintillator detectors. Scan Microsc 3, 739-763 (1989)
2. Autrata R, Hermann R. Müller M: An efficient single crystal BSE detector in SEM. Scanning 14, 127-135 (1992)
3. Bartos R: Prague, private communication
4. Bauer E: The resolution of the low energy electron reflection microscopy. Ultramicroscopy 17, 51-56 (1985)
5. Bauer E: Low energy electron microscopy. Rep Progr Phys 57, 895-938 (1994)
6. Born M, Wolf E: Principles of Optics. Pergamon Press, Oxford (1975) Ch. 10.4
7. Buseck P, Cowley J, Eyring L: High-Resolution Transmission Electron Microscopy and Associated Techniques. Oxford University Press (1988) 269
8. Frank L, Müllerová I: Zero-charging electron microscopy in a cathode lens equipped SEM. Proc 13th Int Congr El Microsc, Vol. 1. Paris, 139-140 (1994)
9. Frank L, Müllerová I, Delong A: Microscopy with slow electrons. Czech J Phys B44, 195-238 (1994)
10. Frank L, Zadrazil M, Müllerová I: Low energy imaging of nonconductive surfaces in SEM. Mikrochim Acta (suppl.) 13, 289-298 (1996)
11. Joy DC, Joy CS: Low voltage scanning electron microscopy. Micron 27, 247-263 (1996)
12. Lenc M, Müllerová I: Optical properties and axial abberation coefficients of the cathode lens in combination with a focusing lens. Ultramicroscopy 45, 159-162 (1992a) and references therein.
13. Lenc M, Müllerová I: Electron optical properties of a cathode lens. Ultramicroscopy 41, 411-417 (1992b)
14. Lencová B, Wisselink G: Program package for the computation of lenses and deflectors. Nucl Instrum Meth Phys Res A298, 56-66 (1990)
15. Li L, Koziol C, Wurm K, Hong Y, Bauer E, Tsong IST: Surface morphology of Pb overlayers grown on Si(100)-(2x1). Phys Rev B50, 10834-10842 (1994)
16. Müllerová I, Frank L: Very low energy microscopy in commercial SEMs. Scanning 15, 193-201 (1993)
17. Müllerová I, Frank L: Use of cathode lens in scanning electron microscope for low voltage applications. Mikrochim Acta 114/115, 389-396 (1994)
18. Müllerová I, Lenc M: Some approaches to low-voltage scanning electron microscopy. Ultramicroscopy 41, 399-410 (1992)
19. Pejchl D, Müllerová I, Frank L: Unconventional imaging of surface relief. Czech J Phys B43, 983-992 (1993)
20. Pejchl D, Müllerová I, Frank L: Separator of primary and signal electrons for very low energy SEM. Czech J Phys B44, 269-276 (1994)
21. Watson PR, Van Hove MA, Herman K: NIST Surface Structure Database - Ver. 2.0. NIST Gaithersburg, Md., USA (1966)
22. Woodruff DP, Delchar TA: Modern Techniques of Surface Science. Cambridge University Press, Cambridge (1986) 34