Ta-O phonon peaks in tantalum oxide films on Si

Thin Solid Films

Volumn 381, Issue 1, 2001, Pages 57-61

  Ono, H ^a   Hosokawa, Y ^a   Shinoda, K ^a   Koyanagi, K ^a   Yamaguchi, H ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; PHONONS; SILICON; SUBSTRATES; TANTALUM COMPOUNDS;

TRANSMISSION FOURIER-TRANSFORM INFRARED SPECTROSCOPY;

DIELECTRIC FILMS;

EID: 0035152319     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01550-9     Document Type: Article

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