Effect of the substrate pretreatment on the epitaxial growth of indium nitride

Applied Surface Science

Volumn 169-170, Issue , 2001, Pages 345-348

  Guo, Qixin ^a   Okada, Akira ^a   Nishio, Mitsuhiro ^a   Ogawa, Hiroshi ^a  

^a SAGA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; NITROGEN; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SEMICONDUCTOR PLASMAS; SINGLE CRYSTALS; SPUTTERING; SUBSTRATES;

INDIUM NITRIDE;

SEMICONDUCTING FILMS;

EID: 0035127434     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00673-5     Document Type: Article

References (7)

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