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Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 605-610

High sensitivity quadrupole mass spectrometry of neutrals sputtered by UV-laser ablation of polymers

(3) Lazare, Sylvain a Guan, Weiping a Drilhole, David a

a CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; EXCIMER LASERS; MASS SPECTROMETERS; MASS SPECTROMETRY; MIXTURES; POLYMERS; VACUUM APPLICATIONS;

DEPTH PROFILING ANALYSIS; ETCHING TIME; GAS ANALYZER; LASER ABLATION SPUTTERED NEUTRALS SPECTROMETRY; MASS INTENSITY; MICROABLATION; ULTRAHIGH VACUUM;

LASER ABLATION;

EID: 0030563040 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/0169-4332(95)00562-5 Document Type: Article

Times cited : (22)

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