Design and performance of an excimer-laser based optical system for high precision microstructuring

Optics and Laser Technology

Volumn 29, Issue 8, 1998, Pages 439-447

  Gerlach, K H ^a   Jersch, J ^a   Dickmann, K ^a   Hildenhagen, L J ^a  

^a UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Beam conditioning optics; Excimer lasers; Microstructuring

Indexed keywords

CERAMIC MATERIALS; LASER ABLATION; LASER BEAM CUTTING; MASKS; MICROMACHINING; OPTICAL PROJECTORS; OPTICAL RESOLVING POWER; OPTICAL VARIABLES MEASUREMENT; OPTIMIZATION; POLYIMIDES; SCANNING ELECTRON MICROSCOPY;

DEMAGNIFICATION RATIO; HIGH PRECISION MICROMACHINING; LASER MICROMACHINING; MASK PROJECTION SYSTEM; SPINNERET;

EXCIMER LASERS;

EID: 0031277191     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0030-3992(97)00049-2     Document Type: Article

References (40)

1. Harvey, E.C., Rumsby, P.T., Gower, M.C., Remnant, J.L. Microstructuring by excimer laser, Proc SPIE, Micromachining Microfabrication Process Technol, Austin, TX, 2639 (1995)
2. Schaeer, R.D., Scaggs, M.J., McGarry, T.P. Materials processing with excimer-lasers, Materials and Manufacturing Processes, Vol. 5 (4), New York, Basel, Hong Kong, Marcel Dekker, (1990) 617-640
3. Heekenjann, P.B. Anlagenentwicklung unter unsicheren Annahmen am Beispiel einer lasergestützten Präzisionsbearbeitungsstation, Düsseldorf, Fortschritt-Berichte VDI, Reihe 2, Fertigungstechnik nr. 370 (1995)
4. VDI (Ed.), Materialbearbeitung mit Excimerlasern: Broschüre zur Ergebnispräsentation der vom BMBF geförderten Verbundprojekte Materialbearbeitung mit dem Excimerlaser (homogene Materialien| Schichtmaterialien) und EUREKA - Projekt High Power Excimer Laser (EU205), Düsseldorf, VDI (1995)
5. Metev, S., Sepold, G. (Ed.), Excimer Lasers and New Trends in Laser Microtechnology, Meisenbach Bamberg (1993)
6. Bergmann, H. W., Schutte, K., Schubert, E., Emmel, A. Laser-surface processing of metals and ceramics for industrial applications, Appl Surf Sci, 86 (1995) 259-265
7. Ehrlich, D.J., Tsao, J.Y. (Eds), Laser-Microfabrication, Thin Film Processes and Lithography, San Diego, CA, Academic Press (1989)
8. Sengupta, U.K. Excimer Lasers for Microlithography: Working Knowledge and Practical Considerations, Cymer Laser Technologies, San Diego, actual version
9. Gedrat, O. Strukturierung technischer Keramik mit Excimer-Laserstrahlung, Dr Ing. Diss., Universität Hannover (1992)
10. Hesse, D. Abtragen und Schneiden von Kohlefaserverbundwerkstoffen mit Excimer-Laserstrahlung, Dr Ing. Diss. Universität Hannover (1994)
11. Arnold, J.M. Abtragen metallischer und keramischer Werkstoffe mit Excimerlasem, Dr Ing Diss, IFSW Universität Stuttgart, Stuttgart, Teubner (1994)
12. Tönsho, H.K., Gedrat, O. Absorption behaviour of ceramic materials irradiated with excimer-lasers, Proc SPIE. Excimer Laser mater. Processing Beam Delivery Systems 1377 (1990) 38-44
13. Duley, W.W. UV Laser: Effects and Applications in Materials Science, Cambridge, Cambridge University Press (1996)
14. Lokai, P., Rebhahn, U., Stamm, U., Bucher, H., Kahlert, H.-J., Basting, D. High spectral brightness 1.0 pm bandwidth DUV lithography excimer laser, Proc SPIE, 1674 (2) (1992) 669-680
15. Christensen, C.P. Capabilities of low power excimer lasers in micromachining, Conf Proc LEOS 93, IEEE Lasers Electro-Opt (1993) 762-763
16. Christensen, C. P. Waveguide excimer laser fabrication of 3D microstructures, Proc SPIE 2045 (1994) 141-145
17. Ibbs, K.G., Osgood, R.M. (Eds.), Laser Chemical Processing for Microelectronics, Cambridge Studies in Modern Optics. 7, Cambridge, Cambridge University Press (1989)
18. IFSW - Institut für Strahlwerkzeuge (Ed.), 10 Jahre IFSW: Laser in der Materialbearbeitung, Mikrobearbeitung mit Lasern (1996) 32-35
19. Phillips, H. M., Callahan, D. L., Sauerbrey, R., Szabo, G., Bor, Z. Direct laser ablation of sub-100 nm line structures into polyimide, Appl Phys A, 54 (1992) 158-165
20. Liedl, G., Schroder, K., Kaplan, A. Excimer laser processing of ferrite video heads, Appl Surf Sci, 106 (1996) 374-378
21. Zimmer, K., Hirsch, D., Bigi, F. Excimer laser machining for the fabrication of analogous microstructures, Appl Surf Sci, 96-98 (1996) 425-429
22. Ihlemann, J., Wolff-Rottke, B., Danev, G., Petkov, K., Spassova, E. Structuring of polyimide-metal carbide layer systems by excimer laser ablation, Appl Surf Sci, 86 (1995) 245-250
23. Tönsho, H.K., Mommsen, J. Process of generating 3D-microstructures with excimer lasers (Ed. Laude L.D.) Excimer Lasers, ASI Series 265 (1994) 221-236
24. Mommsen, J. ELPEC - mikrobearbeitungsstation für excimerlaser, Laser Magazin, 5/6 (1993) 30-33
25. Kahlert, H.J., Sarbach, U., Burghardt, B., Klimt, B. Excimer laser illumination and imaging optics for controlled microstructure generation, Proc SPIE, Excimer Lasers: Applic, Beam delivery systems Laser Des 1835 (1992) 110-118
26. Harte, K.J. Excimer Laser Beam Delivery Systems, SPIE's Microelectronic Integrated Processing: Growth, Monitoring and Control, Santa Clara (1989)
27. Fuhr, G., Shirley, S. G. Shaped masks aid prototyping of electrode structures by laser ablation, Lamda Physik Science Report, 7 (1996) 6-7
28. Liu, Y.S. Sources, optics, and laser microfabrication systems for direct writing and projection lithography, Laser Microfabrication - Thin Film Processes and Lithography 3-84 (Ed. Ehrlich, D.J., Tsao, J.Y.), New York, Academic Press (1989)
29. Eschenburg, A. Herstellung mikromechanischer Bauteile mit Excimer - Laserstrahlung am Beispiel von Mikrozahnrädern, FH-Münster, Diplomarbeit (1994)
30. Dickmann, K., Eschenburg, A. Herstellung mikromechanischer Bauteile mit Excimer-Laserstrahlung, in Laser in Research and Engineering - Proc 12th Int Congr Laser 95 (Ed. Waidelich, W. et al.) Berlin, Heidelberg, New York, Springer (1996) 943-946
31. Breuer, J., Metev, S. Modification of polymer surfaces by UV excimer laser radiation using polypropylene as sample, Laser u Optoelektronik, 6 (1996) 48-55
32. Luk Yanchuk, B., Bityurin, N., Anisimov, S., Bäuerle, D. Photophysical ablation of organic polymers, Excimer Lasers API Series E: Applied Sciences (Ed. Laude, L.D.) 265 (1994) 59-77
33. Lazare, S. Mechanisms of polymer photoablation by UV lasers, Annu Phys, 15(3) (1990) 23-26
34. Himmelbauer, H., Ahrenholz, E., Bäuerle, D. UV-laser induced surface topology changes in polyimide, Appl Phys A, A63(4) (1996) 337-339
35. Himmelbauer, H., Ahrenholz, E., Bäuerle, D. Single-shot UV-laser ablation of polyimide with variable pulse lengths, Appl Phys A, A63(1) (1996) 87-90
36. Luk Yanchuk, U., Bityurin, N., Anisimov, S., Arnold, N., Bäuerle, D. The role of excited species in ultraviolet laser material ablation. 3. Non stationary ablation of organic polymers, Appl Phys A, 62(5) (1996) 397-401
37. Tokarev, V. N., Marine, W., Prat, C., Sentis, M. Clean processing of polymers and smoothing of ceramics by pulsed laser melting, J Appl Phys, 77(9) (1995) 4714-4723
38. Srinivasan, R. Chemical transformations of the polyimide kapton brought about ultraviolet laser radiation, J Appl Phys, 78(8) (1995) 4881-4887
39. Endert, H., Burghardt, B., Kahlert, H.-J., Rebhan, U., Basting, D. Bohren von Polyimid Substraten mit Excimerlasern, Laser-Technologie und Anwendungen 3. Essen, Ausgabe Vulkan (1993) 303-312
40. Sarbach, U., Kahlert, H.-J. Excimer laser based microstructuring using mask projection techniques, Highlights Lambda Phys April (1993)