Graded transmission dielectric optical masks by laser ablation

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 881-884

  Rubahn, K ^a   Ihlemann, J ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

Dielectric mask; Laser ablation

Indexed keywords

DIELECTRIC FILMS; EXCIMER LASERS; HAFNIUM COMPOUNDS; LASER ABLATION; LIGHT REFLECTION; LIGHT TRANSMISSION; MULTILAYERS; OPTICAL FILMS; PLASTIC FILMS; PULSED LASER APPLICATIONS; SILICA; SURFACE STRUCTURE;

DIELECTRIC OPTICAL MASKS; GRADED TRANSMISSION SYSTEMS;

MASKS;

EID: 0032074515     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00761-7     Document Type: Article

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