Potential applications of electroactive polymer sensors and actuators in MEMS technologies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4234, Issue , 2001, Pages 203-214

  Shahinpoor, M ^a  

^a MSC01 1070   (United States)

Author keywords

Distributed sensors and actuators micro arrays; EAP micro sensors and micro actuators; MEMS; Robotic micromanipulation and assembly

Indexed keywords

GRIPPERS; MICROACTUATORS; MICROSENSORS; POLYMERS;

ELECTROACTIVE POLYMER SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034984784     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.424408     Document Type: Conference Paper

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