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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 510-521

Mathematical modeling of sputtering-induced surface roughness

(3) Ali, M Y a Hung, N P a Yuan, S a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Beam profile; Focused ion beam; Micromachining; Silicon; Sputtering; Surface roughness

Indexed keywords

ACCELERATION; BINDING ENERGY; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ION BEAMS; MICROELECTRONICS; MICROMACHINING; SPUTTER DEPOSITION;

FOCUSSED ION BEAMS (FIB);

SURFACE ROUGHNESS;

EID: 0034872813 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.425392 Document Type: Conference Paper

Times cited : (1)

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