Producing LIGA-competitive microcomponents

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue 1, 2000, Pages 49-57

  Hung, N P ^a   Ali, M Y ^a   Yuan, S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

3D microcomponent; Focused ion beam; Gas assisted etching; High aspect ratio; Micromolding; Nickel beryllium alloy; Sputtering

Indexed keywords

ASPECT RATIO; ETCHING; FOCUSING; INTERFACES (MATERIALS); ION BEAMS; NICKEL ALLOYS; SPUTTER DEPOSITION;

FOCUSED ION BEAMS; GAS-ASSISTED ETCHING; MICROMOLDING; THREE-DIMENSIONAL MICROCOMPONENTS;

MICROMACHINING;

EID: 0034547221     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.396444     Document Type: Article

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