Modeling, scheduling, and prediction in wafer fabrication systems using queueing petri net and genetic algorithm

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2001, Pages 3559-3564

  Wen, H W ^a   Fu, L C ^a   Huang, S S ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; GENETIC ALGORITHMS; INVENTORY CONTROL; PETRI NETS; PROCESS CONTROL; QUEUEING THEORY; SCHEDULING; THROUGHPUT; WSI CIRCUITS;

WAFER FABRICATION SYSTEMS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034861485     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)

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