Modeling, analysis, simulation and control of semiconductor manufacturing systems: a generalized stochastic colored timed Petri net approach

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 3, Issue , 1999, Pages

  Lin, Ming Hung ^a   Fu, Li Chen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED GUIDED VEHICLE SYSTEMS; GENERALIZED STOCHASTIC COLORED TIMED PETRI NET; INTERBAY SYSTEM; INTRABAY SYSTEM;

COLLISION AVOIDANCE; COMPUTER AIDED MANUFACTURING; COMPUTER CONTROL SYSTEMS; COMPUTER SIMULATION; HEURISTIC METHODS; INDUSTRIAL ROBOTS; INTEGRATED CIRCUIT MANUFACTURE; MOTION PLANNING; PLANT LAYOUT; SCHEDULING;

PETRI NETS;

EID: 0033308144     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. MengChu Zhou and Mu Der Jeng, "Modeling, Analysis, Simulation, Scheduling, and Control of Semiconductor Manufacturing System: A petri Net Approach.", IEEE Tran, on Semiconductor Manufacturing, Vol. 11, pp. 333-357, 1998.
2. Jorn W. Janneck and Martin Naedele, "Modeling a Die Bonder with Petri Nets : A Case Study.", IEEE Tran, on Semiconductor Manufacturing, Vol. 11, pp. 404-409, 1998.
3. Huanxin Henry Xiong and MengChu Zhou, "Scheduling of SeMICONDUCTOR Test Facility via Petri Nets and Hybrid Heuristic Search.", IEEE Tran, on Semiconductor Manufacturing, Vol. 11, pp. 384-393, 1998.
4. Mohamed Allam and Hassane Alia, " Modeling and Simulation of an Electronic Component Manufacturing System Using Hybrid Petri Nets.", IEEE Tran, on Semiconductor Manufacturing, Vol. 11, pp. 374-383, 1998.
5. Sheng-ya Lin and Han-Pang Hung, "Modeling and Emulation of a Gurnace in IC Fab Based on Colored-Timed Petri Net.", IEEE Tran, on Semiconductor Manufacturing, Vol. 11, pp. 410-420, 1998.
6. Mu Der Jeng, Xiaolan Xie and Shih Wei Chou, "Modeling, Qualitative Analysis, Simulation, and Performance Evaluation of the Etching Area in an IC Wafer Fabrication System Using Petri Nets.", IEEE Tran, on Semiconductor Manufacturing, Vol. 11, pp. 358-373, 1998.