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Volumn , Issue , 2001, Pages 158-161
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Effects of polysilicon shield on spiral inductors for silicon-based RF IC’s
a a a a b b b b b |
Author keywords
Floating shield; Ground shield; High resistive polysilicon; Quality factor; Spiral inductor; Substrate loss
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Indexed keywords
CONDUCTIVE MATERIALS;
ELECTRIC SHIELDING;
POLYSILICON;
SEMICONDUCTING SILICON;
SUBSTRATES;
GROUND SHIELD;
SPIRAL INDUCTORS;
ELECTRIC INDUCTORS;
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EID: 0034854180
PISSN: 19308868
EISSN: None
Source Type: Journal
DOI: 10.1109/VTSA.2001.934507 Document Type: Article |
Times cited : (9)
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References (13)
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