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Volumn , Issue , 2001, Pages 158-161

Effects of polysilicon shield on spiral inductors for silicon-based RF IC’s

Author keywords

Floating shield; Ground shield; High resistive polysilicon; Quality factor; Spiral inductor; Substrate loss

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRIC SHIELDING; POLYSILICON; SEMICONDUCTING SILICON; SUBSTRATES;

EID: 0034854180     PISSN: 19308868     EISSN: None     Source Type: Journal    
DOI: 10.1109/VTSA.2001.934507     Document Type: Article
Times cited : (9)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.