In-situ etching of InP based BH laser structures in MOVPE

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 2001, Pages 398-400

  Gessner, R ^a   Guy, A ^a   Veuhoff, E ^a   Borchert, B ^a   Illek, S ^a   Schier, M ^a   Wenger, G ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; ETCHING; HYDROGEN; INDIUM COMPOUNDS; LASER ABLATION; SEMICONDUCTING GALLIUM ARSENIDE; TERBIUM COMPOUNDS; THERMAL EFFECTS;

BURIED HETEROSTRUCTURE (BH) LASERS; EX SITU ETCHING PROCESS;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0034853970     PISSN: 10928669     EISSN: None     Source Type: Journal    
DOI: 10.1109/ICIPRM.2001.929142     Document Type: Article

References (7)