메뉴 건너뛰기




Volumn 11, Issue 3, 2001, Pages

Multiscale approach to material synthesis by gas phase deposition

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; COMPOSITION; CRYSTAL IMPURITIES; GASES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

EID: 0034842535     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:2001315     Document Type: Conference Paper
Times cited : (3)

References (53)
  • 15
    • 0003775704 scopus 로고
    • Technical report 94012188A-ENG, SEMATECH
    • (1994)
    • Geyling, F.T.1
  • 42
    • 0003775021 scopus 로고    scopus 로고


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.