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Volumn 11, Issue 3, 2001, Pages
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Multiscale approach to material synthesis by gas phase deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL REACTORS;
CHEMICAL VAPOR DEPOSITION;
COMPOSITION;
CRYSTAL IMPURITIES;
GASES;
SYNTHESIS (CHEMICAL);
THERMAL EFFECTS;
ELEMENTARY REACTIONS;
FILM GROWTH;
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EID: 0034842535
PISSN: 11554339
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1051/jp4:2001315 Document Type: Conference Paper |
Times cited : (3)
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References (53)
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