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Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals

Volumn 65, Issue 7, 2001, Pages 635-643

Formation of titanium and aluminum films by supersonic free-jet PVD method

(4) Yumoto, A a Hiroki, F a Shiota, I a Niwa, N a

a KOGAKUIN UNIVERSITY (Japan)

Author keywords

Aluminum; Gas evaporation; Physical vapor deposition; Supersonic free jet; Titanium; Ultra fine particle

Indexed keywords

ALUMINUM; EVAPORATION; FILM GROWTH; FLOW OF FLUIDS; HELIUM; NOZZLES; PARTICLES (PARTICULATE MATTER); PHYSICAL VAPOR DEPOSITION; TITANIUM; VACUUM; VELOCITY;

GAS EVAPORATION; GAS VELOCITY; SUPERSONIC FREE JET PHYSICAL VAPOR DEPOSITION; ULTRAFINE PARTICLE;

METALLIC FILMS;

EID: 0034819163 PISSN: 00214876 EISSN: None Source Type: Journal
DOI: 10.2320/jinstmet1952.65.7_635 Document Type: Article

Times cited : (8)

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