Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 135-140

  Akedo, Jun ^a   Ichiki, Masaaki ^a   Kikuchi, Kaoru ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEPOSITION; EXCIMER LASERS; LASER ABLATION; MOLDING; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; SENSORS;

THREE DIMENSIONAL MICROSTRUCTURE; ULTRA FINE PARTICLE JET MOLDING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030679956     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)