Preparation of piezoelectric thick films using a jet printing system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. A, 1997, Pages 1159-1163

  Adachi, Hideo ^a   Kuroda, Yoshimi ^a   Imahashi, Takuya ^a   Yanagisawa, Kazuhisa ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Dielectricity; Ferroelectricity; Jet printing system; Mask depositing; Piezoelectricity; PZT; Thick film

Indexed keywords

JET PRINTING SYSTEMS (JPS); MASK DEPOSITING;

CERAMIC MATERIALS; DEPOSITION; FERROELECTRICITY; FILM PREPARATION; LITHOGRAPHY; PERMITTIVITY MEASUREMENT; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; THICK FILMS; X RAY DIFFRACTION ANALYSIS;

DIELECTRIC FILMS;

EID: 0031102609     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.1159     Document Type: Article

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