Application of jet-printed PZT -layers for actuation of small beams, membranes and a 2-dimensional scanning actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3242, Issue , 1997, Pages 172-180

  Schroth, Andreas ^a   Ichiki, Masaaki ^a   Maeda, Ryutaro ^a   Akedo, Jun ^a   Matsumoto, Sohei ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

FEM; Jet printing; Membrane; Piezoelectric; PZT; Scanner; Thin layer

Indexed keywords

ABLATION; ACTUATORS; FINITE ELEMENT METHOD; JETS; LASER ABLATION; LASER BEAMS; LASERS; MEMBRANES; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PRINTING; SEMICONDUCTING LEAD COMPOUNDS; SOLDERED JOINTS; STEEL;

FEM; JET PRINTING; PIEZOELECTRIC; PZT; SCANNER; THIN LAYER;

SCANNING;

EID: 22544445629     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293545     Document Type: Conference Paper

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