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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue 1, 2001, Pages 414-422

Feature-shape and line-edge roughness measurement of deep sub-micron lithographic structures using small-angle neutron scattering

(4) Lin, Eric K a Wu, Wen li a Lin, Qinghuang b Angelopoulos, Marie b

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; NEUTRON DIFFRACTION; NEUTRON SCATTERING; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

SMALL ANGLE NEUTRON SCATTERING;

PHOTORESISTS;

EID: 0034765759 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.436767 Document Type: Article

Times cited : (2)

References (15)

1
- 0000138772
- edited by D.G. Seiler, A.C. Diebold, W.M. Bullis, T.J. Shaffner, R. McDonald, and E.J. Walters (American Institute of Physics, College Park, MD)
- (1998) Characterization and Metrology for ULSI Technology , pp. 491
- Marchman, H.¹

2
- 0033262026
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 2723
- Reynolds, G.W.¹ Taylor, J.W.²

3
- 0001488964
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2498
- Martin, Y.¹ Wickramasinghe, K.²

4
- 0032403802
- (1998) Proc. SPIE , vol.3332 , pp. 19
- Nelson, C.¹ Plamateer, S.² Lyszczarz, T.³

5
- 24644487409
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 334
- Reynolds, G.W.¹ Taylor, J.W.²

6
- 0029346243
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1484
- Raymond, C.J.¹ Murnane, M.R.² Naqvi, S.S.H.³ McNeil, J.R.⁴

7
- 0000397556
- (1999) J. Opt. Soc. Am. A , vol.16 , pp. 2904
- Coulombe, S.A.¹ McNeil, J.R.²

8
- 0001644530
- (1999) Appl. Opt. , vol.38 , pp. 5920
- Kallioniemi, I.¹ Saarinen, J.² Oja, E.³

9
- 0021916151
- (1985) Proc. IEEE , vol.73 , pp. 894
- Gaylord, T.K.¹ Moharram, M.G.²

10
- 0001060868
- (2000) J. Appl. Phys. , vol.88 , pp. 7298
- Wu, W.L.¹ Lin, E.K.² Lin, Q.H.³ Angelopoulos, M.⁴

11
- 0004027763
- Oxford University Press, New York
- (2000) Methods of X-ray and Neutron Scattering in Polymer Science
- Roe, R.J.¹

12
- 0034493074
- (2000) J. Appl. Crystallogr. , vol.33 , pp. 793
- Choi, S.M.¹ Barker, J.G.² Glinka, C.G.³ Cheng, Y.T.⁴ Gammel, P.L.⁵

13
- 0033536156
- (1999) Nature , vol.400 , pp. 146
- Jones, R.L.¹ Kumar, S.K.² Ho, D.L.³ Briber, R.M.⁴ Russell, T.P.⁵

14
- 0001800379
- (2000) J. Appl. Phys. , vol.87 , pp. 1193
- Wu, W.L.¹ Wallace, W.E.² Lin, E.K.³ Lynn, G.W.⁴ Glinka, C.G.⁵ Ryan, E.T.⁶ Ho, H.M.⁷

15
- 84994404586
- Note

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.