Small angle neutron scattering measurements of nanoscale lithographic features

Journal of Applied Physics

Volumn 88, Issue 12, 2000, Pages 7298-7303

  Wu, Wen Li ^a   Lin, Eric K ^a   Lin, Qinghuang ^b   Angelopolous, Marie ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001060868     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1324688     Document Type: Article

References (12)

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11. All data in the text and in the figures are presented with the standard deviation associated with the measurement.
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