Characterization of diffraction gratings in a rigorous domain with optical scatterometry: Hierarchical neural-network model

Applied Optics

Volumn 38, Issue 28, 1999, Pages 5920-5930

  Kallioniemi, Ilkka ^a,b   Saarinen, Jyrki ^a,b,c   Oja, Erkki ^a,b  

^a AALTO UNIVERSITY   (Finland)

^b Department of Physics and Mathematics ^*  (Finland)

^c Heptagon Oy   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001644530     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.005920     Document Type: Article

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