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Volumn 352, Issue , 2000, Pages 35-42
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Structural, Mechanical and Optical Properties of TiN and (Ti,AI)N Coatings
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Author keywords
Magnetron Sputtering; Mechanical Characteristics; Optical Characteristics; Ti,AiN; TiN
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Indexed keywords
CORROSION RESISTANCE;
ELECTRON TRANSITIONS;
ELLIPSOMETRY;
LIGHT REFLECTION;
MAGNETRON SPUTTERING;
MAGNETRONS;
MATHEMATICAL MODELS;
MICROHARDNESS;
SCANNING ELECTRON MICROSCOPY;
SPUTTER DEPOSITION;
TITANIUM NITRIDE;
VICKERS HARDNESS TESTING;
CORROSION RESISTANT COATINGS;
DRUDE MODELS;
MAGNETRON DEPOSITION SYSTEM;
SCRATCH TESTS;
PROTECTIVE COATINGS;
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EID: 0034542990
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.352.35 Document Type: Article |
Times cited : (2)
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References (19)
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