Investigations of TiN films optical and mechanical characteristics

Materials Science Forum

Volumn 282-283, Issue , 1998, Pages 139-146

  Zlatanovic M ^a   Sesum D ^a   Djukic Dj ^a   Popovic N ^b  

^a Faculty of Electrical Engineering   (Serbia)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Magnetron Sputtering; Mechanical Characteristics; Optical Characteristics; TiN

Indexed keywords

ELLIPSOMETRY; FILM GROWTH; HARDNESS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OPTICAL VARIABLES MEASUREMENT; REFLECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

MAGNETRON DEPOSITION;

TITANIUM NITRIDE;

EID: 0031638828     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.282-283.139     Document Type: Article

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