Optical emission spectroscopy as a real time diagnostic tool for plasma-assisted deposition of TiN

Plasma Chemistry and Plasma Processing

Volumn 17, Issue 2, 1997, Pages 181-192

  Boumerzoug, Mohamed ^a   Boudreau, Marcel ^a   Mascher, Peter ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

Electron cyclotron resonance plasma; Optical emission spectroscopy; TiN deposition

Indexed keywords

EID: 0031505164     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02766814     Document Type: Article

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