The effect of multiply charged ions on the vickers hardness of (Ti, Al) N films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 A, 1998, Pages 2656-2659

  Suzuki, Akira ^a  

^a Nihon Seimitsu Co Ltd   (Japan)

Author keywords

(Ti,Al)N film; Arc ion plating; Droplet; Multiply charged ion

Indexed keywords

ALUMINUM COMPOUNDS; IONS; MAGNETIC FIELD EFFECTS; NITRIDES; THIN FILMS; TITANIUM COMPOUNDS;

ARC ION PLATING; DROPLETS REDUCTION;

PLATING;

EID: 0032066170     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2656     Document Type: Article

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